![]() 3.2 shows some specifications of the X and Y axis. 3.1 summarizes the specifications of the three axis mounted on the micro-milling machine The Z axis is a ATS20010 Aerotech ground ball-screw stage with a positional accuracy of 0,7µmįixed to the bridge of the machine (Fig. The Y stage is mounted on the X stage, the latter is fixed to the granite Linear brushless servomotor and mechanical bearings are installed on each stage and the positional accuracy is 0,2µm for the X axis and 0,3µm for the Y axis. The X and Y axis are ALS25010 Aerotech linear motor. The linear encoders LT10AS Aerotech with a resolution of 0,005µm are The drive system for the setup is shown inįig. Setup has a software based controller, Automation 3200. The max travel of the stage is 100mm and the movement depends on the control system. The flexural modulus of elasticity is 52,5GPa in the direction parallel to rift and 75,2GPa in the perpendicular direction. The density is 2,93kg/m−3, the compressive strength isĢ40MPa while the flexural strength is 22MPa. ![]() Granite, a material which is widely used. Tool-holder, unfortunately no drawing of the internal part was provided by the constructor.Īs visible in the picture above the material of the foundation and the bridge of the machine are In Appendix A the drawings of the whole machine and in particular of the stages are shown theĭrawings of the external part of the spindle indeed are in Appendix C together with those of the ![]() Particular the axis were constructed by Aerotech, whose engineering specification is listed in Tab.ģ.1. This machine has been assembled with components produced by different companies. 3.1) present at Delft University of Technology is a three axis high PROBLEM DESCRIPTION 3.1 Micro-milling at TU Delft
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